sputtering gold, silver, copper /spin coater /lab plasma coating equipment /3 Rotary Target Plasma Sputtering Coater
TN-16-3HD-LD is a CE certified compact three rotary target plasma sputtering coater with a touch screen digital controller, and a substrate heater capable of heating up to 500 °C. It can coat 1- 3 types of metallic materials to sample with the diameter up to 50 mm. Three sputtering targets: gold, silver, copper are included for immediate use.
SPECIFICATIONS:
Input Power | Single phase 220 VAC, 50 / 60Hz 700 W (including vacuum pump) For using 110 VAC, we will include a transformer for you. |
Output Power | 1600 VDC 40 mA max |
Vacuum Chamber | Vacuum chamber: 150 mm ID x 150 mm H, made of high purity quartz Sealing flange made of stainless steel with flat O-ring |
Sample Stage with Heater
| Stage size: 50 mm Dia. Sputtering distance range: 25 – 40 mm adjustable Rotatable stage with three sputtering positions (controlled by the touch screen) Substrate heater is built-in with a maximum heating temperature of 500 °C PID temperature controller with +/- 1 °C accuracy is integrated into the touch screen |
Control Panel | 6" color touch screen with PLC integration for easy operation Vacuum gauge, sputtering current meter, and substrate temperature control are integrated to the touch screen panel Adjustment knobs on the front panel for gas intake and sputtering current control Sputtering position, sputtering timer, and process logging are accessible from the touch screen |
Shield
| Stainless steel shield cage is included for extra protection |
Sputtering Targets | Target size requirements: 47 mm Dia. x 2.5 mm max Three targets are included in the standard package for immediate use: Au target, 47 mm Dia. x 0.12 mm Ag target, 47 mm Dia. x 0.5 mm Cu target, 47 mm Dia. x 2.5 mm |
Vacuum Pump
| Built-in KF25 vacuum port for connecting to a vacuum pump Vacuum pump with KF25 connector is required, but not included. A double stage mechanical vacuum pump for vacuum up to 1.0E-2 Torr Or a turbo pump for vacuum up to 1.0E-5 Torr Vacuum pump can be plugged into the power outlet on the left of coater for automatic control |
Dimensions | 440 mm L × 330 mm W × 455 mm H |
Net Weight | 50 kg |
Compliance | CE approval |
Warranty | One year limited with lifetime support |
Application Notes | For the best film-substrate adhesion strength, please clean the substrate surface before coating: Ultrasonic cleaning with the following sequential baths - (1) acetone, (2) isopropyl alcohol - to remove oil and grease. Blow dry the substrate with N2, then hot bake in vacuum to remove absorbed moisture Plasma cleaning may be needed for surface roughening, surface chemical bonds activation, or additional contamination removal A thin buffer layer (~5 nm), such as Cr, Ti, Mo, Ta, could be applied to improve adhesion of metals and alloys · A two-stage pressure regulator (not included) should be installed on the gas cylinder to limit the output pressure of gas to below 0.02 MPa for safe usage. Please use > 5N purity Ar gas for plasma sputtering · The sputtering coater can be placed into an Ar and N2 gas glove box for coating · HIGH VOLTAGE! Sputtering heads connect to high voltage. For safety, the operator must shut down the equipment before sample loading and target changing operations This model is not suitable for coating light metallic material such as Al, Mg, Zn, Ni, etc. due to low energy. Please consider our magnetron sputtering coater or thermal evaporation coater. |
Founded in 2005, Zhengzhou Tainuo Film Materials Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.
We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
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