Item | result (ULSI/SLSI/XLSI) |
Assay (wt %) | 28.0~30.0 |
Color(APHA) max. | 5 |
Residue after Ignition max. | 1 ppm |
Substances Reducing KMnO4(O2) max. | 1 ppm |
Carbonate(CO3) max. | 1 ppm |
Chloride (Cl) max. | 30 ppb |
Nitrate (NO3) max. | 50 ppb |
Phosphate (PO4) max. | 40 ppb |
Sulfate (SO4) max. |