XYZ linear stage piezo stage for micro-nanopositioning highly precision for AFM piezo nano positioner

Models

 S-Closed loop

K-Open loop

P11.X100S

P11.X100K

P11.Z100S

P11.Z100K

P11.Z200S

P11.Z200K

P11.Z300S

P11.Z300K

P11.XY100S

P11.XY100K

P11.XZ100S

P11.XZ100K

P11.XYZ100S

P11.XYZ100K

Units

Active axes

X

Z

XY

XZ

XYZ

Travel range

@120V

80

80

160

240

80

80

80

μm±20%

Travel range@150V

100

100

200

300

100

100

100

μm±20%

Sensor

SGS/-

Closed/open loop resolution

7/4

nm

Closed-loop linearity

0.05/-

0.05/-

0.15/-

0.5/-

0.1/-

0.1/-

0.1/-

%F.S.

Repeatability

0.02/-

0.02/-

0.06/-

0.12/-

0.03/-

0.03/-

0.05/-

%F.S.

Stiffness

0.3

0.3

0.45

0.25

X0.25/Y0.3

X0.25/Z0.3

X0.25/Y0.3/Z0.2

N/μm±20%

Unloaded resonant frequency

0.3

0.3

0.18

0.12

X0.2/Y0.3

X0.2/Z0.3

X0.2/Y0.3/Z0.18

kHz±20%

Closed/open-loop unloaded Step time

10/0.8

10/0.8

10/0.8

10/0.8

15/0.8

15/0.8

20/0.8

ms±20%

Unloaded operating frequency

10% Travel

100

100

100

100

100

100

50

Hz±20%

100% Travel

9

10

10

10

9

9

5

Load capacity

0.8

0.8

0.5

0.4

0.7

0.7

0.6

kg

Capacitance

1.8

1.8

3.6

5.4

1.8/axis

1.8/axis

1.8/axis

μF±20%

Material

Steel, Aluminum

Mass

100

100

170

230

170

170

230

g±5%