Vacuum Pirani Gauge For PVD Coating System

Pirani Gauge For Vacuum Composite Meter In Vacuum Coating Machine

Pirani vacuum gauge, also known as resistive vacuum gauge, is Mr. Pirani made in 1906. Its working principle is: different degree of vacuum, air molecules per unit volume is different; for being heat resistance wire, to remove heat capacity (heat capacity) is different, temperature resistance wire is different. Because the resistance wire resistivity is a function of temperature, so that different degree of vacuum caused a different resistivity. Different resistance, current voltage drop across the resistor wire is different. According to a change in voltage can be converted from the air pressure, which is measured vacuum. The actual pirani gauge generally made of four-arm bridge, and a resistance wire used for temperature compensation of its series.

ZJ-52T Pirani gauge:

This type of regulation of use after stabilizing treatment, heat capacity small vacuum hot wire as the sensing element, and has automatic temperature compensation and dust protection, with wide range, fast response, anti-pollution, anti-oxidation, drift, long life , stable performance and other characteristics. Especially suitable for coarse, low vacuum measurement.

Main technical parameters:

1. Measuring range: 1 X 10⁵ ~ 1 X 10^-1Pa

2. Filament material: tungsten wire (optional platinum wire or nickel chromium wire)

3. cold filament resistance: 86.5 ± 1.7Ω (23 ± 3 ℃)

4. Filament temperature: 40 ~ 300 ℃

5. Fragmentation: no more than ± 25% (3 X 10³ ~ 1 X 10^-1Pa)

6. The baking temperature and vacuum connection in the form of:

Φ15.5 ± 0.5 glass tube 80 ℃

Φ15.5 ± 0.1 straight metal tube 80 ℃

KF10 quick release flange 80 ℃

KF16 quick release flange 80 ℃

KF25 quick release flange 80 ℃

KF40 quick release flange 80 ℃

KF35 flange 450 ℃ ultrahigh.