Thin Film Coating PVD Vacuum Cathodic Arc Deposition Machine
Thin Film Coating PVD Vacuum Cathodic Arc Deposition Machine
| Machine Photos |
| Technical Spcifications |
| Model Number | ARC-1000 | ARC-1200 | ARC-1400 | ARC-1800 | ARC-2000 |
| Dimension of vacuum chamber(diameter*height) | 1000*1100 | 1200*1400 | 1400*1600 | 1800*2000 | 2000*2200 |
| Material of vacuum chamber | SUS304 or SUS316L with cooling jacket | ||||
| Quantity of arc sources | 8-12 sets | 10-14 sets | 12-16 sets | 14-24 sets | 18-36 sets |
| Pumping system | molecular pump or diffusion pump+mechanical pump | molecular pump or diffusion pump+mechanical pumps, booster pump | |||
| Pumping Time | From atmosphere to 5.0*10-2Pa less than 8 minutes | ||||
| Bias Power Supply | 20kW | 30kW | 40kW | 60kW | 60kW |
| Gas distribution System with Mass Flow Controllers | ≥2 sets | ||||
| Vacuum Limit | 5.0*10-4 Pa | ||||
| Working temperature | 100-250 centigrades | ||||
| Working mode | Automatic or Manual mode, by 10.4 inches PLC touches screen | ||||
| Total Power | 70-180kW | 70-180kW | 70-180kW | 120-300kW | 120-300kW |
| Footprint | 3*3 meters | 3*3 meters | 3*4 meters | 4*5 meters | 4*5 meters |
1. The inner packing is protective plastic film to protect the PVD machine from moisture and rain.
2. The out packing is plywood plate with steel to keep the PVD machine in good condition during the long distance transportation.
After the customer tested the PVD coating machine and make sure the machine is no problem, we will take the machine apart. The solid packing can make sure you will receive a machine without any destroy.
In order to help you choose the best suitable PVD coating machine, please try to reply my questions below, thanks for your cooperation.
Q1: What is your product, and the max. dimension?
Q2: The size of your processing material, your desired daily production capacity?
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