Measuring Range(L) | Grade 1 | Grade 0 | Grade 00 | ||||||
Limited Error | Parallelism | Limited Error | Parallelism | Limited Error | Parallelism | ||||
0<L<300mm | +/-1.2um | +/-1.0um | +/-0.8um | +/-0.8um | - | - | |||
300<L<600mm | +/-1.8um | +/-1.5um | +/-1.0um | +/-1.0um | - | - | |||
600<L<1000mm | +/-2.5um | +/-1.5um | +/-1.5um | +/-1.0um | +/-1.0um | 1.0um | |||
1000<L<15000mm | +/-4um | +/-2um | +/-2.5um | +/-1.5um | +/-1.5um | 1.5um |