PECVD Plasma Enhanced Chemical Vapor Deposition
Tube Furnace System used for material deposition
PECVD system
Split Tube furnace
| 1 | 1200oC Max. working temperature for < 60 minutes |
2 | 1100oC Max for continuous heating | |
3 | 30 segments programmable precision digital temperature controller | |
4 | 440 mm length single heating zone and 150 mm length constant temperate zone | |
5 | High purity quartz tube optional from ( click optional bar to choose ) | |
6 | 3.14"OD x 2.83"ID x 48'' Length | |
7 | One pair of vacuum sealed flange with valves | |
8 | Input power: 208 – 240V AC input, single phase at max. 4KW | |
Plasma RF Power supply
| 1 | Output Power: 5 -500W adjustable with ± 1% stability |
2 | RF frequency: 13.56 MHz ±0.005% stability | |
3 | Reflection Power: 200W max. | |
4 | Matching: Automatic | |
5 | RF Output Port: 50 Ω, N-type, female | |
6 | Noise: <50 dB. | |
7 | Cooling: Air cooling. | |
8 | Power : 208-240VAC, 50/60Hz | |
9 | Note: This RF power supply can accept 50 - 80 mm Max. quartz tube by changing flange | |
Anti-corrosive Pressure Gauge
| 1 | 3.8x10-5 to 1125 Torr measurement range |
2 | Anti-corrosive, gas-type independent | |
3 | High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection | |
4 | Fast atmospheric detection eliminates waiting time and shortens process cycle | |
5 | Easy to exchange plug & play sensor element | |
Vacuum Pump and valve
| 1 | Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust System installed in bottom case with max. vacuum pressure 10-2 torr. |
2 | KFD25 adapter and stainless steel pipe are connected between pump and tube flange with precision ball valve | |
3 | Digital vacuum pressure gauge and display are installed with the furnace | |
Mass Flow meters
| 1 | Four precision mass flow meters (0.02% accuracy) with digital display are installed on the bottom case to control gas flow rate automatically. |
2 | MFC 1: Gas flow range from 0~100 sccm | |
3 | MFC 2&3: Control range from 0~200 sccm | |
4 | MFC 4: Control range from 0~500 sccm | |
5 | One gas mixing tank is installed on bottom case with liquid release valve | |
6 | 4 stainless steel needle valves is installed on left side of bottom case to control 4type gases mixing manually | |
7 | Gas inlet fitting: four 1/4NPS | |
8 | Gas outlet fitting: four 1/4NPS |
PECVD furnace
PECVD Tube Furnace
PECVD / cvd furnace for sale
PECVD
1. Reply your inquiry in 24 working hours.
2. Experienced staffs answer all your questions in fluent English.
3. Customized design is available.
4. Exclusive and unique solution can be provided to our customer by our well-trained and
professional engineers and staff.
5. Professional factory : We are manufacturer, specializing in laboratory furnaces.
PECVD
contact information:
contact person: Tanya Wang
Skype: tanyawang55
mobile: 0086 18137195603; 13526477203 for 24 hours
1. Are you a manufacturer or trade company ?
Yes,you can assured that we are a producer with full
experience doing business in domestic and oversea.
2. We are not professional for operation and installation of your machine?
While it is not a stumbling block,our machine is easy to operate,
no need to professional training,and the instruction manual and
vedio sent to you are enough.What’s more,we have professional
engineers and they can solve all questions.
3. How about packaging ?………….if machine damaged,what should I do ?
Usually machine is packed with wooden case and standard export carton,
plywood carton or as your requirement.Damage haven’t happened before,
if happen,we will arrange replacement.