Plasma Enhanced CVD coating machine with RF generator source
Plasma Enhanced CVD coating machine with RF generator source
Introduction
In order to allow the chemical reaction to proceed at a lower temperature, the activity of the plasma is utilized to promote the reaction, and thus the CVD is called plasma enhanced chemical vapor deposition (PECVD),
Application
the PECVD graphene film preparation apparatus is operated by 13.56 MHz. The RF output or the like ionizes a gas containing a film-constituting atom, forms a plasma in the vacuum chamber, utilizes the strong chemical activity of the plasma, improves the reaction conditions, and utilizes the activity of the plasma to promote the
reaction, depositing a desired film on the substrate.
Technical Parameter
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Split Tube furnace
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1200oC Max. working temperature for < 60 minutes |
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1100oC Max for continuous heating |
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30 segments programmable precision digital temperature controller |
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440 mm length single heating zone and 150 mm length constant temperate zone |
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High purity quartz tube optional from ( click optional bar to choose ) |
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3.14"OD x 2.83"ID x 48'' Length |
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One pair of vacuum sealed flange with valves |
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Input power: 208 – 240V AC input, single phase at max. 4KW |
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Plasma RF Power supply
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Output Power: 5 -500W adjustable with ± 1% stability |
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RF frequency: 13.56 MHz ±0.005% stability |
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Reflection Power: 200W max. |
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Matching: Automatic |
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RF Output Port: 50 Ω, N-type, female |
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Noise: <50 dB. |
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Cooling: Air cooling. |
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Power : 208-240VAC, 50/60Hz |
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Note: This RF power supply can accept 50 - 80 mm Max. quartz tube by changing flange |
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Anti-corrosive Pressure Gauge
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3.8x10-5 to 1125 Torr measurement range |
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Anti-corrosive, gas-type independent |
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High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection |
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Fast atmospheric detection eliminates waiting time and shortens process cycle |
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Easy to exchange plug & play sensor element |
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Vacuum Pump and valve
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Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust System installed in bottom case with max. vacuum pressure 10-2 torr. |
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KFD25 adapter and stainless steel pipe are connected between pump and tube flange with precision ball valve |
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Digital vacuum pressure gauge and display are installed with the furnace |
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Mass Flow meters
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Four precision mass flow meters (0.02% accuracy) with digital display are installed on the bottom case to control gas flow rate automatically. |
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MFC 1: Gas flow range from 0~100 sccm |
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MFC 2&3: Control range from 0~200 sccm |
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MFC 4: Control range from 0~500 sccm |
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One gas mixing tank is installed on bottom case with liquid release valve |
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4 stainless steel needle valves is installed on left side of bottom case to control 4type gases mixing manually |
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Gas inlet fitting: four 1/4NPS |
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Gas outlet fitting: four 1/4NPS |
PECVD furnace
Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.
We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
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