PECVD ion vacuum coating machine
Chemical vapor deposition coating machine, in a vacuum state into acetylene and methane gas, carbon atoms in the transmission to extract the gas by high frequency power supply, high temperature deposition on the surface of substrate to form in the ultra-high hardness film!
TiN,TiC,ZrN,CrN,Ti,Ni,Cr,Cu and other compounds film, multi-layer super-hard film, nitrogen-doped titanium film and the alloy film, and in a very short time to complete all the machining process, it is a highly efficient multi-functional coating equipment.
mould PVD vacuum coating equipment is widely used in the fields of ultra-hard coating about the tools and mould, decorative coating about car wheels, ceramics, golf, watches making, hotel product, sanitary ware, luminaires, optical frame, hardware, etc .
Technical parameter:
Mode Dimension |
JYCVD-0708 |
JYCVD -900 |
JYCVD-1000 |
JYCVD-1200 |
JYCVD-800 |
700*800mm |
900*1000mm |
1000*1100mm |
1200*1100mm |
800*900mm |
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Maily application |
Metal decorative coating and Ceramic decorative coating |
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Coating mode and main confirguration |
Eight multi-arc targets |
Ten multi-arc targets |
Twelve multi-arc targets |
Twenty multi-arc targets |
Twenty two multi-arc targets |
Power source |
Electric-arc power, Filament power, |
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Process gas control |
Mass flowmeter + Electromagnetic ceramic valve |
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Vacuum chamber structure |
Vertical side opening door, pump system postposition, double water cooling |
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Vacuum system |
Molecule pump +Roots pump +Mechanical pump(8.0*10-5Pa) Diffusion pump +Roots pump +Mechanical pump(8.0*10-4Pa) |
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Workpiece baking temperature |
Normal temperature to 350 centi-degree PID control, radiation heating. |
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Workpiece motion mode |
Public rotation Frequency control: 0-20 rotation per minute |
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Measure mode |
Number display composite vacuum gauge: from atmosphere to 1.0*10-5Pa |
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Control mode |
Manual/Automatic/PC/PLC + HMI/PC four choice of control mode |
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Remark |
We can design the dimension of the equipment according to customers special technique requirement. |
Best regards;Looking forward to your reply!
Wechat: nbjunying