400 type single chamber thermal evaporation coating system
For the preparation of conductive films, semiconductor films, ferroelectric films, optical films and so on.
System composition:
The vapor deposition design system mainly comprises a vacuum pumping and vacuum measuring system, a vacuum chamber system, a workpiece rack system, an evaporation source system, a film thickness testing system, an evaporation boat baffle system, a baking lighting system, a water cooling cycle and an alarm system, Design of electronic control and computer control systems, auxiliary systems, etc.
Technical parameter:
Ultimate vacuum |
≤ 6.7* 10 Pa |
Recovery vacuum time |
pumping from 1×10 Pa to 5×10 Pa≤20min |
System leakage rate |
6. 7*10-7Pa.L / S |
Vacuum chamber |
400 x 400mm cylindrical vacuum chamber, |
Evaporation source |
1-4, using resistance evaporation boat, evaporation blue, skein, beam source furnace to the bottom up evaporation coating. |
Evaporation temperature |
heating temperature: room temperature to 1800℃ |
Evaporation boat |
The evaporation boat is on the circumference of 100-160 mm from the center; the evaporation boat can be lifted up and down, and the adjustment range is 0-150 mm (the distance between the sample center and the crucible is 150-300 mm); |
Workbench type and size |
sample tray diameter Φ300mm, can be placed on a small sample of 20mm diameter; sample tray has a rotation function, the speed is 0 ~ 20 rev / min, the speed is adjustable; the sample tray can swing angle, angle is 0 to 30 degrees adjustable; |
Baking temperature |
400°C digital display automatic thermocouple temperature control (high temperature furnace plate, digital display automatic thermocouple temperature control can be heated to 700 ℃) |
Resistance evaporation source |
voltage 5V, 10V, power 2.5KW, water-cooled electrode 1~4 pairs |
Quartz crystal film thickness controller |
film thickness measurement range 0-999999Å |
1. Factory prices with the best quality.
2. One year free-of-charge maintenance for all the dental equipment
3. Customized service for special demand
4. Fast and flexible delivery, by sea, by air, by express
5. Quick response within 24 hours
How to order
1. If you are interested in our products, please tell us the model number and quantity.
2. We will make a proforma invoice for your order.
3. We will deliver the product ASAP on receipt of the payment
Guarantee
1. Guarantee for one year after shipment.
Payment
1. Western Union
2. PayPal
3. Secure Payment through Alibaba
4. Telegraphic transfer
5. L/C
Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development, design,
manufacturing and sales of equipment used in scientific researches. Independence and innovation is the
company's tenet.Our main products include: tube furnace, muffle furnace, plasma cleaner, vacuum furnace,
atmosphere furnace,CVD system and customized lab equipment.Welcome you come to visit us.
1. Are you a manufacturer or trade company ?
Yes,you can assured that we are a professional manufacturer with full experience, and
doing business in domestic and oversea for many years.
2. We are not professional for operation and installation of your machine?
While this is not difficult to solve,our machine is easy to operate,no need to
professional training,and the instruction manual and vedio we make can teach you step by step.
What’s more,we have professional engineers , if needed we can send them to your side to solve the problem.
Also we supply online service at any time.
3. How about packaging ? if machine damaged,what should I do ?
Usually machine is packed with wooden case and standard export carton,
plywood carton or as your requirement. Before delivery we will also send you the packing photos of the goods to confirm with you. After agreed, we will deliver it.
Damage haven’t happened before, if happen,we will arrange replacement.
4. We haven’t do business before,how can I trust your company and machine ?
We have been GOLD supplier with no complaints on Alibaba.and our machine have exported to many countries all over the world