Microwave Power | 0.6-6kW / 2.45GHz |
Reactor Chamber Material | Stainless Steel |
Stage Type | Water-cooling |
Standard Substrate Holder | 75mm (Φ3inch) |
Standard Gas Channel | 5 channels (H2/CH4/N2/Ar/O₂) |
Operating Pressure Range | 10~250 Torr |
Vacuum Leak Integrity (by He leak detector) | <1.0*10-9Torr I/sec |
Vacuum Pump Type (Standard) | Rotary Vacuum Pump [4.4L/s (50/60Hz)] |
Capacity | 200-250 carat |