Chamber size | Dia 60x300mm (can be customised) | |||
Max. temperature | 1200 C (<2hour) | 1400 C (<2hour) | 1700 C (<2hour) | |
Working temperature | 1100 C | 1300 C | 1600 C | |
Temperature controlling | PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor. | |||
51 programmable segments for precise control of heating rate, cooling rate and dwell time. | ||||
Built in PID Auto-Tune function with overheating & broken thermocouple broken protection. | ||||
Over temperature protection and alarm allows for operation without attendant. | ||||
Temperature accuracy | ±1C | |||
Temperature Uniformity | ±5C over 120mm | |||
±3C over 80mm | ||||
Heating rate | 0-20C /min | |||
Thermocouple | K type | S type | B type | |
Heating element | Heating wire | SiC heating element | MoSi2 Heating element | |
Furnace Chamber | 2 layers of ceramic fiber insulation | 3 layers of ceramic fiber insulation | 3 layers of ceramic fiber insulation | |
1st: 1430°C ceramic fiber board | 1st: 1700°C ceramic fiber board | 1st : 1800°C ceramic fiber board | ||
2nd: 1260°C ceramic fiber board | 2nd:1430°C ceramic fiber board | 2nd: 1600°C ceramic fiber board | ||
| 3rd: 1260°C ceramic fiber board | 3rd: 1260°C ceramic fiber board | ||
Furnace structure | Double layer steel casing with dual cooling fan, surface temperature below 60C | |||
Safety | Power cutting off when furnace door open | |||
Working voltage | 110V or 220V or 380V, 50HZ or 60HZ | |||
Rated power | 2KW | |||
Can be Vertical ? | YES | |||
Can be Rotary? | YES | |||
Can be Multi zone? | YES | |||
CVD system | OPTIONAL | |||
Stander chamber size (mm) |
40x300 60x300 80x300 100x300 120x300 150x300 40x450 60x450 80x450 100x450 120x450 150x450
Note: the chamber size can be customized |
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