Type | LZ-1000 | LZ-1200 | LZ-1300 | LZ-1600 | LZ-2100 | LZ-2300 | |||||
Vacuum Chamber Size | Ф1000×H 1000mm | Ф1200×H 1300mm | Ф1300×H 1300mm | Ф1600×H 1800mm | Ф2100×H 3600mm | Ф2300×H 4500mm | |||||
Power Supply | Pulse bias power supply, arc power supply (power can be different according to requirements) | ||||||||||
Vacuum Chamber Structure | Vertical single/double door, rear vacuum acquisition system | ||||||||||
Vacuum Chamber Material | SUS-304 superior stainless steel | ||||||||||
Ultimate Vacuum | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | |||||
Pumping Speed | From 1 atm to 6.7×10-3Pa take 8~15min (room temperature, clean and unload) | ||||||||||
Vacuum System | Diffusion pump + roots pump + rotary vane pump + holding pump (can be adjusted according requested) | ||||||||||
Number Of Multi-Arc | 4 | 8 | 8 | 16 | 36 | 45 | |||||
Shelves Rotation System | Planetary revolution and rotation, frequency control, upper and base rotation shelves, number of axes equipped by requested. | ||||||||||
Process Gas | Mass flow controller (3-4 ways), manual or automatic processing gas systems | ||||||||||
Cooling System | Water-cooling system. Cooling water tower, industrial chiller or ply-cold system need to be purchased separately. ( or supplied by user) | ||||||||||
Control Mode | Manual or PLC + touch screen | ||||||||||
Alarm And Protection | Water pressure alarm, air pressure alarm, over current protection, execution on related protective measures and electrical interlock systems. | ||||||||||
Foot Print | W3m×L3.5m | W3.5m×L5m | W3.5m×L5m | W4.5m×L5.5m | W4.5m×L11m | W5m×L12m | |||||
Other Technical Data | Water pressure≥0.2MPa, water temperature≤25℃, air pressure 0.5-0.8MPa | ||||||||||
Remarks | Specific size can be designed by user’s requested. DC magnetron power supply and intermediate frequency power supply can be equipped to meet the different coating process. Customizable vacuum chamber size range: Ф 500-3000mm, H: 500-7000mm. |