Bonding workstage | ||
Load ability | 1 piece | |
XY stroke | 10inch*6inch(working range 6inch*2inch) | |
Accuracy | 0.2mil/5um | |
Dual work stage can feed continuously |
Wafer workstage | ||
XY travel stroke | 6inch*6inch | |
Accuracy | 0.2mil/5um | |
Wafer position accuracy | +-1.5mil | |
Angle accuracy | +-3 degree |
Die dimension | 5mil*5mil-100mil*100mil |
Wafer dimension | 6inch |
Picking up range | 4.5inch |
Bonding force | 25g-35g |
Multi wafer ring design | 4 wafer ring |
Die type | R/G/B 3type |
Bonding arm | 90degree rotary |
Motor | AC servomotor |
Image recognition system | ||
Method | 256 gray scale | |
Check | ink dot,chipping die,crack die | |
Display screen | 17inch LCD 1024*768 | |
Accuracy | 1.56um-8.93um | |
Optics magnification | 0.7X-4.5X |
Bonding cycle | 120ms |
Number of program | 100 |
Max die number on one substrate | 1024 |
Die lost check method | vacuum sensor test |
Bonding cycle | 180ms |
Glue dispensing | 1025-0.45mm |
Die lost check method | vacuum sensor test |
Input voltage | 220V |
Air source | min.6BAR,70L/min |
Vacuum source | 600mmHG |
Power | 1.8kw |
Dimension | 1310*1265*1777mm |
Weight | 680kg |