This equipment is multi arc ion coating equipment. Multi arc ion plating uses gas discharge or partial dissociation of evaporated materials to deposit evaporated or reactive materials on the substrate at the same time of bombardment by gas ions or particles of evaporated materials.
Features
1. The coating instrument also adopts the integrated design, the cavity and the electric control part are left and right separated, realizing the separation of water and electricity, and effectively ensuring the safety of users.
2. The combination of glow discharge, plasma technology and vacuum evaporation can not only improve the film quality, but also expand the application of the film.
3. It has the advantages of fast evaporation rate, strong adhesion, good diffraction and wide film material. It is very suitable for hard protective coating such as TiN.
4. At the same time, the color of the film can be changed by controlling the atmosphere, and the film is firmly combined with the substrate.
Technical parameters of Multi-Arc ion coating equipment:
sample stage |
Planetary sample table, OD 305mm, six stations around The workpiece can be hung on the support bar of each station Peripheral speed 1 ~ 20rpm adjustable |
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Multi-arc ion target |
φ84mm x 2 |
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Vacuum chamber |
Size |
φ300mm *400mm |
Material |
304stainless steel |
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watch window |
φ100mm anti-dazzling screen |
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opening mode |
front opening door |
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Film thickness control |
Crystal mode, optional multi-channel |
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Vacuum system |
Backing pump |
Bipolar rotary vane pump |
Extraction interface |
KF16 |
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Secondary pump |
turbo molecular pump |
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Extraction interface |
CF160 |
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Vacuum gauge |
Resistance and ionization Compound vacuum gauge |
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Exhaust rate |
mechanical pump:1.1L/s molecular pump: 600L/s |
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ultimate vacuum |
1.0E-5Pa |
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pumping rate |
Rotary vane pump:1.1L/S |
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Voltage |
AC 220V 50/60Hz |
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Control system |
automatic control Operation interface: touch screen + operation panel |
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Other |
Voltage |
AC380V,50Hz |
Total power |
5kW |
|
Dimensions |
1000mm* 800mm * 1500mm |
|
Weight |
350kg |
Pictures of Multi-Arc ion coating equipment:
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Zhengzhou CY Scientific Instrument Co., Ltd.- is a high and new technology enterprise registered in Zhengzhou,Henan province. Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in researching and developing, designing and manufacturing of equipment used in scientific researches.
Our mainly products include high temperature furnace and heating element, like lab muffle furnace, tube furnace, dental furnace, vacuum furnace,gold melting furnace, SiC heating element, MoSi2 heating element, alumina tubes and crucibles, and etc.
wooden case