CE 2300C vertical High vacuum graphite heater furnace
YFVF-2300 vacuum furnace. Water-cooled stainless steel vacuum flanges with valves are installed to achieve a vacuum of 10-2 to10-5 torr through a mechanical or molecular vacuum pump. It is designed for calcining or annealing semiconductor wafers (up to 6") under vacuum or various other gas atmospheres with a temperature up to 2300°C.
The high temperature vacuum furnace is a horizontal single-chamber structure, and its main body is a double-layer water-cooled structure, consisting of a furnace body, a heating system and a vacuum system ,water cooling system and electrical control parts.
High temperature sintering furnace heating method USES to give graphite heating bar into low voltage (24-36v) large current, so that graphite heating Method of heating.Thyristor is used to regulate the voltage and the transformer to reduce the voltage.The temperature in the single temperature zone is controlled by a temperature controller .
| Work zone size | 200 200 200mm support customized bottom loading |
| Thermal keep room |
Stainless steel Angle as the frame, stainless steel mesh paving, inner lining multi - layer soft garphite felt |
| Alarm | over temperature /current /pressure,lack water |
| Max temperature | 2300C |
| Max working temperature | 2100C |
| Temperature Accuracy | Under full load,keep 1400C ≤±1℃(Insulation ring test) |
| Heating Rate |
Under full load,from 100C to 1000C ,15C per minute.fromm 1000C to max temperature 10C per minute |
| Power | 90KWA 380V(±10%) 60HZ |
| Temperature Control | PLC touch screen controller |
| Furnace Atmosphere | Nitrogen, Argon and other inert gases |
| cool water flow metaer | 10m3/h |
| water pressure | 0.25Mpa |
| Thermocouple | 3 point B type +infrared thermometer |
| Controller measure range | 0-2500℃ |
| Vacuum pump | mechanical pump, roots pump ,diffusion pump |
| vacuum degree | 5X10-5 torr. |
| Vacuum meter | digital vacuum meter |
| Heating Element |
adopt the cage structure consisting of graphite rods. The design and arrangement of graphite rod are considered in vacuum and atmosphere. |
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Under the condition of temperature field uniformity control, and easy replacement. |
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| Outer sheel |
The steel plate is welded to the water-cooled sandwich cylinder, double layer structure, inner layer and outer layer are made of stainless steel, flange made of stainless steel, with the two ends of the water-cooled furnace door.The connection between the furnace body and each part is made of fourferrorubber Ring seal. Other parts of the system may be installed on the furnace or connected to the furnace body. |
| Vacuum acquisition system |
It consists of a mechanical pump, roots pump ,diffusion pump ,an inflatable electromagnetic vacuum valve, a vacuum butterfly valve, a diaphragm valve and a pipe.Aerated electromagnetic vacuum. |
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The valve and the slide valve pump at the same time to prevent the pump oil backflow into the vacuum system.1 vacuum diaphragm valve for filling process gas, |
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| 1 only used for filling air in front of the furnace to break the vacuum. |
YIFAN FURNACE HAVE OWN DEVELOPMENT TEAM SUPPORT ALL KINDS OEM /ODM DESIGN .SPECIALLY IN HEATING EQUIPMENTS FOR 15 YEARS .ENSURE BEST QUALITY PRODUCTS AND AFTER SALE SERVICE .
Warranty:Our products are warranted to be free from defects in materials or workmanship for one year from the date of purchase. Within this period, Across International will, at its sole options, replace any components that fail in normal use. Such replacement will be made at no charge to the customer for parts, provided that the customer shall be responsible for any transportation cost. This warranty does not cover consumables and failures due to abuse, misuse, accident or unauthorized alteration or repairs.
Replacement will be shipped to you after photo or other evidence are provided and investigated.
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