xyz linear stage amplified piezoelectric platform piezo nano stepper motorized piezo actuator drive
·xyz linear stages
·amplified piezoelectric
·Piezo nano stepper
Models |
S-Closed loop K-Open loop |
P12A.X100S P12A.X100K |
P12A.Z100S P12A.Z100K |
P12A.XY100S P12A.XY100K |
P12A.XZ100S P12A.XZ100K |
P12A.XYZ100S P12A.XYZ100K |
Units |
Active axes |
X |
Z |
X,Y |
X,Z |
X,Y,Z |
|
|
Travel range(0~120V) |
80 |
80 |
80/axis |
80/axis |
80/axis |
μm±20% |
|
Travel range(0~150V) |
100 |
100 |
100/axis |
100/axis |
100/axis |
μm±20% |
|
Integrated sensor |
SGS/- |
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Aperture |
45×45 |
mm |
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Closed/open loop resolution |
7/4 |
7/4 |
7/4 |
7/4 |
7/4 |
nm |
|
Closed-loop linearity |
0.1/- |
0.1/- |
0.1/- |
0.1/- |
0.15/- |
%F.S |
|
Repeatability |
0.04/- |
0.04/- |
0.05/- |
0.05/- |
0.1/- |
%F.S |
|
Pitch/Yaw/Roll |
<10 |
<10 |
<15 |
<15 |
<20 |
μrad |
|
Push/pull force capacity |
30/10 |
30/10 |
25/8 |
25/8 |
20/4 |
N |
|
Stiffness |
0.3 |
0.3 |
X0.25/Y0.3 |
X0.3/Z0.25 |
X0.3/Y0.25/Z0.2 |
N/μm±20% |
|
Unloaded resonant frequency |
230 |
200 |
X170/Y200 |
X200/Z150 |
X200/Y150/Z120 |
Hz±20% |
|
Closed/open-loop unloaded Step time |
10/0.8 |
10/0.8 |
15/0.8 |
15/0.8 |
30/0.8 |
ms±20% |
|
Unloaded operating frequency |
10% Travel |
60 |
65 |
55 |
50 |
30 |
Hz±20% |
100% Travel |
8 |
8 |
7 |
6 |
4 |
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Load capacity |
0.7 |
0.7 |
0.7 |
0.7 |
0.5 |
kg |
|
Electrical capacitance |
1.8 |
1.8 |
1.8/axis |
1.8/axis |
1.8/axis |
μF±20% |
|
Material |
Steel, Aluminum |
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Mass |
240 |
240 |
290 |
290 |
350 |
g±5% |
Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.
Technical data are measured by CoreMorrow E00/E01 series piezo controller.
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